At what size of transistor does semiconductor manufacturing become practical for independent manufacture?

Currently, only one company in the world -- ASML -- has the technological capability necessary for the creation of photolithography machines which are sufficient for the production of modern semiconductor devices. What I'm wondering is at what point does semiconductor manufacturing become practical, or even feesible for small organizations, or independents? One must be able to surpass the cost of the machines, and the resources necessary to manufacture them. I presume that a company like ASML is also extremely picky -- willfully, or by regulation, or otherwise -- about who they lend their technology to.

I'm not sure if this is the right community for this sort of post. Please let me know if not, and if there is a more suitable place to put it.